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1 Ergebnisse
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Suppression of boron deactivation and diffusion in preamorp..:
Poon, Chyiu Hyia
;
See, Alex
;
Tan, Yunling
..
Journal of Applied Physics. 103 (2008) 8 - p. , 2008
Link:
https://doi.org/10.1063/1.2909957
RT Journal T1
Suppression of boron deactivation and diffusion in preamorphized silicon after nonmelt laser annealing by carbon co-implantation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.2909957&Exemplar=1&LAN=DE A1 Poon, Chyiu Hyia A1 See, Alex A1 Tan, Yunling A1 Zhou, Meisheng A1 Gui, Dong PB AIP Publishing YR 2008 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 103 IS 8 LK http://dx.doi.org/https://doi.org/10.1063/1.2909957 DO https://doi.org/10.1063/1.2909957 SF ELIB - SuUB Bremen
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