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1 Ergebnisse
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Impact of Kr gas mixing in oxygen plasma etching of ferroel..:
Yoon, Joo-Won
;
Ohmi, Shun-ichiro
;
Park, Byung-Eun
.
Applied Physics Letters. 93 (2008) 16 - p. , 2008
Link:
https://doi.org/10.1063/1.2970085
RT Journal T1
Impact of Kr gas mixing in oxygen plasma etching of ferroelectric poly(vinylidene fluoride-trifluoroethylene) copolymer films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.2970085&Exemplar=1&LAN=DE A1 Yoon, Joo-Won A1 Ohmi, Shun-ichiro A1 Park, Byung-Eun A1 Ishiwara, Hiroshi PB AIP Publishing YR 2008 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 93 IS 16 LK http://dx.doi.org/https://doi.org/10.1063/1.2970085 DO https://doi.org/10.1063/1.2970085 SF ELIB - SuUB Bremen
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