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1 Ergebnisse
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Two-dimensional numerical simulation of radio frequency spu..:
Fung, Tze-Ching
;
Chuang, Chiao-Shun
;
Chen, Charlene
...
Journal of Applied Physics. 106 (2009) 8 - p. , 2009
Link:
https://doi.org/10.1063/1.3234400
RT Journal T1
Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.3234400&Exemplar=1&LAN=DE A1 Fung, Tze-Ching A1 Chuang, Chiao-Shun A1 Chen, Charlene A1 Abe, Katsumi A1 Cottle, Robert A1 Townsend, Mark A1 Kumomi, Hideya A1 Kanicki, Jerzy PB AIP Publishing YR 2009 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 106 IS 8 LK http://dx.doi.org/https://doi.org/10.1063/1.3234400 DO https://doi.org/10.1063/1.3234400 SF ELIB - SuUB Bremen
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