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1 Ergebnisse
1
Maskless optical microscope lithography system:
Park, Eung Seok
;
Jang, Doyoung
;
Lee, Jaewoo
...
Review of Scientific Instruments. 80 (2009) 12 - p. , 2009
Link:
https://doi.org/10.1063/1.3266965
RT Journal T1 <Title>Maskless optical microscope lithography system</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.3266965&Exemplar=1&LAN=DE A1 Park, Eung Seok A1 Jang, Doyoung A1 Lee, Jaewoo A1 Kim, Yun Jeong A1 Na, Junhong A1 Ji, Hyunjin A1 Choi, Jae Wan A1 Kim, Gyu-Tae PB AIP Publishing YR 2009 SN 0034-6748 SN 1089-7623 JF Review of Scientific Instruments VO 80 IS 12 LK http://dx.doi.org/https://doi.org/10.1063/1.3266965 DO https://doi.org/10.1063/1.3266965 SF ELIB - SuUB Bremen
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