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Impurity profile broadening and shifts by ion beam mixing:
Paine, B. M.
Journal of Applied Physics. 53 (1982) 10 - p. 6828-6833 , 1982
Link:
https://doi.org/10.1063/1.330072
RT Journal T1 <Title>Impurity profile broadening and shifts by ion beam mixing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.330072&Exemplar=1&LAN=DE A1 Paine, B. M. PB AIP Publishing YR 1982 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 53 IS 10 SP 6828 OP 6833 LK http://dx.doi.org/https://doi.org/10.1063/1.330072 DO https://doi.org/10.1063/1.330072 SF ELIB - SuUB Bremen
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