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1 Ergebnisse
1
Physical and electrical characteristics of the high-k Ta2O5..:
Kao, Chyuan-Haur
;
Chen, Hsiang
;
Chiu, Jing Sing
..
Applied Physics Letters. 96 (2010) 11 - p. , 2010
Link:
https://doi.org/10.1063/1.3334725
RT Journal T1
Physical and electrical characteristics of the high-k Ta2O5 (tantalum pentoxide) dielectric deposited on the polycrystalline silicon
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.3334725&Exemplar=1&LAN=DE A1 Kao, Chyuan-Haur A1 Chen, Hsiang A1 Chiu, Jing Sing A1 Chen, Kung Shao A1 Pan, Yu Tsung PB AIP Publishing YR 2010 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 96 IS 11 LK http://dx.doi.org/https://doi.org/10.1063/1.3334725 DO https://doi.org/10.1063/1.3334725 SF ELIB - SuUB Bremen
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