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Current effects in heavy arsenic implants in silicon:
Cerofolini, G. F.
;
Meda, L.
;
Pignatel, G.
...
Journal of Applied Physics. 58 (1985) 1 - p. 264-267 , 1985
Link:
https://doi.org/10.1063/1.335722
RT Journal T1 <Title>Current effects in heavy arsenic implants in silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.335722&Exemplar=1&LAN=DE A1 Cerofolini, G. F. A1 Meda, L. A1 Pignatel, G. A1 Queirolo, G. A1 Armigliato, A. A1 Solmi, S. A1 Ottaviani, G. PB AIP Publishing YR 1985 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 58 IS 1 SP 264 OP 267 LK http://dx.doi.org/https://doi.org/10.1063/1.335722 DO https://doi.org/10.1063/1.335722 SF ELIB - SuUB Bremen
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