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1 Ergebnisse
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Properties of Si-rich SiNx:H films prepared by plasma-enhan..:
Kaya, Çetin
;
Ma, Tso-Ping
;
Chen, Tze-Chiang
.
Journal of Applied Physics. 64 (1988) 8 - p. 3949-3957 , 1988
Link:
https://doi.org/10.1063/1.341352
RT Journal T1
Properties of Si-rich SiNx:H films prepared by plasma-enhanced chemical vapor deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.341352&Exemplar=1&LAN=DE A1 Kaya, Çetin A1 Ma, Tso-Ping A1 Chen, Tze-Chiang A1 Barker, Richard C. PB AIP Publishing YR 1988 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 64 IS 8 SP 3949 OP 3957 LK http://dx.doi.org/https://doi.org/10.1063/1.341352 DO https://doi.org/10.1063/1.341352 SF ELIB - SuUB Bremen
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