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1 Ergebnisse
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Al and B ion-implantations in 6H- and 3C-SiC:
Rao, Mulpuri V.
;
Griffiths, Peter
;
Holland, O. W.
...
Journal of Applied Physics. 77 (1995) 6 - p. 2479-2485 , 1995
Link:
https://doi.org/10.1063/1.358776
RT Journal T1 <Title>Al and B ion-implantations in 6H- and 3C-SiC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.358776&Exemplar=1&LAN=DE A1 Rao, Mulpuri V. A1 Griffiths, Peter A1 Holland, O. W. A1 Kelner, G. A1 Freitas Jr., J. A. A1 Simons, David S. A1 Chi, P. H. A1 Ghezzo, M. PB AIP Publishing YR 1995 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 77 IS 6 SP 2479 OP 2485 LK http://dx.doi.org/https://doi.org/10.1063/1.358776 DO https://doi.org/10.1063/1.358776 SF ELIB - SuUB Bremen
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