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Gettering of metals by voids in silicon:
Raineri, V.
;
Fallica, P. G.
;
Percolla, G.
...
Journal of Applied Physics. 78 (1995) 6 - p. 3727-3735 , 1995
Link:
https://doi.org/10.1063/1.359953
RT Journal T1 <Title>Gettering of metals by voids in silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.359953&Exemplar=1&LAN=DE A1 Raineri, V. A1 Fallica, P. G. A1 Percolla, G. A1 Battaglia, A. A1 Barbagallo, M. A1 Campisano, S. U. PB AIP Publishing YR 1995 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 78 IS 6 SP 3727 OP 3735 LK http://dx.doi.org/https://doi.org/10.1063/1.359953 DO https://doi.org/10.1063/1.359953 SF ELIB - SuUB Bremen
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