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1 Ergebnisse
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The hydridation and nitridation of GeSi oxide annealed in a..:
Liu, W. S.
;
Nicolet, M.-A.
;
Park, H.-H.
..
Journal of Applied Physics. 78 (1995) 4 - p. 2631-2634 , 1995
Link:
https://doi.org/10.1063/1.360123
RT Journal T1
The hydridation and nitridation of GeSi oxide annealed in ammonia
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.360123&Exemplar=1&LAN=DE A1 Liu, W. S. A1 Nicolet, M.-A. A1 Park, H.-H. A1 Koak, B.-H. A1 Lee, J.-W. PB AIP Publishing YR 1995 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 78 IS 4 SP 2631 OP 2634 LK http://dx.doi.org/https://doi.org/10.1063/1.360123 DO https://doi.org/10.1063/1.360123 SF ELIB - SuUB Bremen
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