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Phosphorus and boron implantation in 6H–SiC:
Rao, Mulpuri V.
;
Gardner, Jason A.
;
Chi, P. H.
...
Journal of Applied Physics. 81 (1997) 10 - p. 6635-6641 , 1997
Link:
https://doi.org/10.1063/1.365236
RT Journal T1 <Title>Phosphorus and boron implantation in 6H–SiC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.365236&Exemplar=1&LAN=DE A1 Rao, Mulpuri V. A1 Gardner, Jason A. A1 Chi, P. H. A1 Holland, O. W. A1 Kelner, G. A1 Kretchmer, J. A1 Ghezzo, M. PB AIP Publishing YR 1997 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 81 IS 10 SP 6635 OP 6641 LK http://dx.doi.org/https://doi.org/10.1063/1.365236 DO https://doi.org/10.1063/1.365236 SF ELIB - SuUB Bremen
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