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1 Ergebnisse
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Compensation implants in 6H–SiC:
Edwards, Andrew
;
Dwight, Deborah N.
;
Rao, Mulpuri V.
...
Journal of Applied Physics. 82 (1997) 9 - p. 4223-4227 , 1997
Link:
https://doi.org/10.1063/1.366226
RT Journal T1 <Title>Compensation implants in 6H–SiC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.366226&Exemplar=1&LAN=DE A1 Edwards, Andrew A1 Dwight, Deborah N. A1 Rao, Mulpuri V. A1 Ridgway, M. C. A1 Kelner, G. A1 Papanicolaou, N. PB AIP Publishing YR 1997 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 82 IS 9 SP 4223 OP 4227 LK http://dx.doi.org/https://doi.org/10.1063/1.366226 DO https://doi.org/10.1063/1.366226 SF ELIB - SuUB Bremen
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