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Analysis of local mechanical stresses in and near tungsten ..:
De Wolf, Ingrid
;
Ignat, Michel
;
Pozza, Georges
..
Journal of Applied Physics. 85 (1999) 9 - p. 6477-6485 , 1999
Link:
https://doi.org/10.1063/1.370151
RT Journal T1
Analysis of local mechanical stresses in and near tungsten lines on silicon substrate
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.370151&Exemplar=1&LAN=DE A1 De Wolf, Ingrid A1 Ignat, Michel A1 Pozza, Georges A1 Maniguet, Laurent A1 Maes, Herman E. PB AIP Publishing YR 1999 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 85 IS 9 SP 6477 OP 6485 LK http://dx.doi.org/https://doi.org/10.1063/1.370151 DO https://doi.org/10.1063/1.370151 SF ELIB - SuUB Bremen
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