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1 Ergebnisse
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A study of nitrogen behavior in the formation of Ta/TaN and..:
Gassilloud, R.
;
Maunoury, C.
;
Leroux, C.
...
Applied Physics Letters. 104 (2014) 14 - p. , 2014
Link:
https://doi.org/10.1063/1.4870338
RT Journal T1
A study of nitrogen behavior in the formation of Ta/TaN and Ti/TaN alloyed metal electrodes on SiO2 and HfO2 dielectrics
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.4870338&Exemplar=1&LAN=DE A1 Gassilloud, R. A1 Maunoury, C. A1 Leroux, C. A1 Piallat, F. A1 Saidi, B. A1 Martin, F. A1 Maitrejean, S. PB AIP Publishing YR 2014 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 104 IS 14 LK http://dx.doi.org/https://doi.org/10.1063/1.4870338 DO https://doi.org/10.1063/1.4870338 SF ELIB - SuUB Bremen
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