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1 Ergebnisse
1
Phase modulation in pulsed dual-frequency capacitively coup..:
Wen, De-Qi
;
Zhang, Quan-Zhi
;
Jiang, Wei
...
Journal of Applied Physics. 115 (2014) 23 - p. , 2014
Link:
https://doi.org/10.1063/1.4884225
RT Journal T1
Phase modulation in pulsed dual-frequency capacitively coupled plasmas
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.4884225&Exemplar=1&LAN=DE A1 Wen, De-Qi A1 Zhang, Quan-Zhi A1 Jiang, Wei A1 Song, Yuan-Hong A1 Bogaerts, Annemie A1 Wang, You-Nian PB AIP Publishing YR 2014 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 115 IS 23 LK http://dx.doi.org/https://doi.org/10.1063/1.4884225 DO https://doi.org/10.1063/1.4884225 SF ELIB - SuUB Bremen
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