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Microfabrication of large-area circular high-stress silicon..:
Serra, E.
;
Bawaj, M.
;
Borrielli, A.
...
AIP Advances. 6 (2016) 6 - p. 065004 , 2016
Link:
https://doi.org/10.1063/1.4953805
RT Journal T1
Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.4953805&Exemplar=1&LAN=DE A1 Serra, E. A1 Bawaj, M. A1 Borrielli, A. A1 Di Giuseppe, G. A1 Forte, S. A1 Kralj, N. A1 Malossi, N. A1 Marconi, L. A1 Marin, F. A1 Marino, F. A1 Morana, B. A1 Natali, R. A1 Pandraud, G. A1 Pontin, A. A1 Prodi, G. A. A1 Rossi, M. A1 Sarro, P. M. A1 Vitali, D. A1 Bonaldi, M. PB AIP Publishing YR 2016 SN 2158-3226 JF AIP Advances VO 6 IS 6 SP 065004 LK http://dx.doi.org/https://doi.org/10.1063/1.4953805 DO https://doi.org/10.1063/1.4953805 SF ELIB - SuUB Bremen
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