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Pulsed laser deposition of piezoelectric lead zirconate tit..:
Schatz, A.
;
Pantel, D.
;
Hanemann, T.
Journal of Applied Physics. 122 (2017) 11 - p. , 2017
Link:
https://doi.org/10.1063/1.5000367
RT Journal T1
Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.5000367&Exemplar=1&LAN=DE A1 Schatz, A. A1 Pantel, D. A1 Hanemann, T. PB AIP Publishing YR 2017 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 122 IS 11 LK http://dx.doi.org/https://doi.org/10.1063/1.5000367 DO https://doi.org/10.1063/1.5000367 SF ELIB - SuUB Bremen
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