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1 Ergebnisse
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Development and control of a hybrid active mount module for..:
Lee, H. H.
;
Kim, K. H.
;
Kim, H. Y.
Review of Scientific Instruments. 91 (2020) 2 - p. 026101 , 2020
Link:
https://doi.org/10.1063/1.5122806
RT Journal T1 <Title>Development and control of a hybrid active mount module for precision stages</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.5122806&Exemplar=1&LAN=DE A1 Lee, H. H. A1 Kim, K. H. A1 Kim, H. Y. PB AIP Publishing YR 2020 SN 0034-6748 SN 1089-7623 JF Review of Scientific Instruments VO 91 IS 2 SP 026101 LK http://dx.doi.org/https://doi.org/10.1063/1.5122806 DO https://doi.org/10.1063/1.5122806 SF ELIB - SuUB Bremen
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