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Verification of frequency scaling laws for capacitive radio..:
Vahedi, V.
;
Birdsall, C. K.
;
Lieberman, M. A.
..
Physics of Fluids B: Plasma Physics. 5 (1993) 7 - p. 2719-2729 , 1993
Link:
https://doi.org/10.1063/1.860711
RT Journal T1 <Title>Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations*</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.860711&Exemplar=1&LAN=DE A1 Vahedi, V. A1 Birdsall, C. K. A1 Lieberman, M. A. A1 DiPeso, G. A1 Rognlien, T. D. PB AIP Publishing YR 1993 SN 0899-8221 JF Physics of Fluids B: Plasma Physics VO 5 IS 7 SP 2719 OP 2729 LK http://dx.doi.org/https://doi.org/10.1063/1.860711 DO https://doi.org/10.1063/1.860711 SF ELIB - SuUB Bremen
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