I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Laser writing on a novel bilayer resist structure:

Li, Kin ; Oprysko, Modest M.
Applied Physics Letters.  46 (1985)  10 - p. 997-999 , 1985
Link: https://doi.org/10.1063/1.95793