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1 Ergebnisse
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Time-of-flight mass spectrometry diagnostics in deep oscill..:
Sanekata, Masaomi
;
Nakagomi, Yuki
;
Hirayama, Mutsuki
...
Journal of Applied Physics. 131 (2022) 24 - p. , 2022
Link:
https://doi.org/10.1063/5.0089592
RT Journal T1
Time-of-flight mass spectrometry diagnostics in deep oscillation magnetron sputtering (DOMS) of titanium
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_5.0089592&Exemplar=1&LAN=DE A1 Sanekata, Masaomi A1 Nakagomi, Yuki A1 Hirayama, Mutsuki A1 Nishida, Hiroshi A1 Nishimiya, Nobuo A1 Tona, Masahide A1 Yamamoto, Hiroaki A1 Tsukamoto, Keizo A1 Fuke, Kiyokazu A1 Ohshimo, Keijiro A1 Koyasu, Kiichirou A1 Misaizu, Fuminori PB AIP Publishing YR 2022 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 131 IS 24 LK http://dx.doi.org/https://doi.org/10.1063/5.0089592 DO https://doi.org/10.1063/5.0089592 SF ELIB - SuUB Bremen
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