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1 Ergebnisse
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Piezoelectric thin films for MEMS:
Kanno, Isaku
;
Ouyang, Jun
;
Akedo, Jun
...
Applied Physics Letters. 122 (2023) 9 - p. , 2023
Link:
https://doi.org/10.1063/5.0146681
RT Journal T1 <Title>Piezoelectric thin films for MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_5.0146681&Exemplar=1&LAN=DE A1 Kanno, Isaku A1 Ouyang, Jun A1 Akedo, Jun A1 Yoshimura, Takeshi A1 Malič, Barbara A1 Muralt, Paul PB AIP Publishing YR 2023 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 122 IS 9 LK http://dx.doi.org/https://doi.org/10.1063/5.0146681 DO https://doi.org/10.1063/5.0146681 SF ELIB - SuUB Bremen
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