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1 Ergebnisse
1
Wake-up free ferroelectric hafnia-zirconia capacitors fabri..:
Hsain, H. Alex
;
Lee, Younghwan
;
Lomenzo, Patrick D.
...
Journal of Applied Physics. 133 (2023) 22 - p. , 2023
Link:
https://doi.org/10.1063/5.0147124
RT Journal T1
Wake-up free ferroelectric hafnia-zirconia capacitors fabricated viavacuum-maintaining atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_5.0147124&Exemplar=1&LAN=DE A1 Hsain, H. Alex A1 Lee, Younghwan A1 Lomenzo, Patrick D. A1 Alcala, Ruben A1 Xu, Bohan A1 Mikolajick, Thomas A1 Schroeder, Uwe A1 Parsons, Gregory N. A1 Jones, Jacob L. PB AIP Publishing YR 2023 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 133 IS 22 LK http://dx.doi.org/https://doi.org/10.1063/5.0147124 DO https://doi.org/10.1063/5.0147124 SF ELIB - SuUB Bremen
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