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Influence of growth temperature on the properties of alumin..:
Sundarapandian, Balasubramanian
;
Yassine, Ali
;
Kirste, Lutz
...
Journal of Applied Physics. 134 (2023) 18 - p. , 2023
Link:
https://doi.org/10.1063/5.0171167
RT Journal T1
Influence of growth temperature on the properties of aluminum nitride thin films prepared by magnetron sputter epitaxy
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_5.0171167&Exemplar=1&LAN=DE A1 Sundarapandian, Balasubramanian A1 Yassine, Ali A1 Kirste, Lutz A1 Baeumler, Martina A1 Straňák, Patrik A1 Fisslthaler, Evelin A1 Prescher, Mario A1 Yassine, Mohamed A1 Nair, Akash A1 Raghuwanshi, Mohit A1 Ambacher, Oliver PB AIP Publishing YR 2023 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 134 IS 18 LK http://dx.doi.org/https://doi.org/10.1063/5.0171167 DO https://doi.org/10.1063/5.0171167 SF ELIB - SuUB Bremen
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