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1 Ergebnisse
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A multivariate parameter trace analysis for online fault de..:
Ko, Jong Myoung
;
Kim, Chang Ouk
International Journal of Production Research. 50 (2012) 23 - p. 6639-6654 , 2012
Link:
https://doi.org/10.1080/00207543.2011.611538
RT Journal T1 <Title>A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1080_00207543.2011.611538&Exemplar=1&LAN=DE A1 Ko, Jong Myoung A1 Kim, Chang Ouk PB Informa UK Limited YR 2012 SN 0020-7543 SN 1366-588X JF International Journal of Production Research VO 50 IS 23 SP 6639 OP 6654 LK http://dx.doi.org/https://doi.org/10.1080/00207543.2011.611538 DO https://doi.org/10.1080/00207543.2011.611538 SF ELIB - SuUB Bremen
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