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Wafer fabrication yield learning and cost analysis based on..:
Tirkel, Israel
;
Rabinowitz, Gad
;
Price, David
.
International Journal of Production Research. 54 (2015) 12 - p. 3578-3590 , 2015
Link:
https://doi.org/10.1080/00207543.2015.1106609
RT Journal T1 <Title>Wafer fabrication yield learning and cost analysis based on in-line inspection</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1080_00207543.2015.1106609&Exemplar=1&LAN=DE A1 Tirkel, Israel A1 Rabinowitz, Gad A1 Price, David A1 Sutherland, Doug PB Informa UK Limited YR 2015 SN 0020-7543 SN 1366-588X JF International Journal of Production Research VO 54 IS 12 SP 3578 OP 3590 LK http://dx.doi.org/https://doi.org/10.1080/00207543.2015.1106609 DO https://doi.org/10.1080/00207543.2015.1106609 SF ELIB - SuUB Bremen
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