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Self-matching plasma sources using 2.45 GHz solid-state gen..:

Latrasse, Louis ; Radoiu, Marilena ; Nelis, Thomas.
Journal of Microwave Power and Electromagnetic Energy.  51 (2017)  4 - p. 237-258 , 2017
Link: https://doi.org/10.1080/08327823.2017.1388338