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Cluster tool module communication based on a high-level fie..:
Lee, Jin-Hwan
;
Lee, Tae-Eog
;
Park, Jeong-Hyeon
International Journal of Computer Integrated Manufacturing. 17 (2004) 2 - p. 151-170 , 2004
Link:
https://doi.org/10.1080/09511920310000
RT Journal T1 <Title>Cluster tool module communication based on a high-level fieldbus</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1080_09511920310000&Exemplar=1&LAN=DE A1 Lee, Jin-Hwan A1 Lee, Tae-Eog A1 Park, Jeong-Hyeon PB Informa UK Limited YR 2004 SN 0951-192X SN 1362-3052 JF International Journal of Computer Integrated Manufacturing VO 17 IS 2 SP 151 OP 170 LK http://dx.doi.org/https://doi.org/10.1080/09511920310000 DO https://doi.org/10.1080/09511920310000 SF ELIB - SuUB Bremen
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