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Determination of migration of ion-implanted Ar and Zn in si..:

Szilágyi, E. ; Bányász, I. ; Kótai, E....
Radiation Effects and Defects in Solids.  170 (2015)  3 - p. 229-237 , 2015
Link: https://doi.org/10.1080/10420150.2015.1039534