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The role of sacrificial target material in micromachining o..:

Rahman, T.U. ; Qayyum, H. ; Amin, U....
Radiation Effects and Defects in Solids.  176 (2021)  7-8 - p. 662-672 , 2021
Link: https://doi.org/10.1080/10420150.2021.1903895