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1 Ergebnisse
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RIE-induced damage and contamination in silicon:
Lee, Young H.
;
Oehrlein, G. S.
;
Ransom, C.
Radiation Effects and Defects in Solids. 111-112 (1989) 1-2 - p. 221-232 , 1989
Link:
https://doi.org/10.1080/10420158908212997
RT Journal T1 <Title>RIE-induced damage and contamination in silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1080_10420158908212997&Exemplar=1&LAN=DE A1 Lee, Young H. A1 Oehrlein, G. S. A1 Ransom, C. PB Informa UK Limited YR 1989 SN 1042-0150 SN 1029-4953 JF Radiation Effects and Defects in Solids VO 111-112 IS 1-2 SP 221 OP 232 LK http://dx.doi.org/https://doi.org/10.1080/10420158908212997 DO https://doi.org/10.1080/10420158908212997 SF ELIB - SuUB Bremen
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