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A hybrid process technology of SiC die separation:
Chen, Shun-Tong
;
Lo, Ping
;
Hu, Chun-Hung
Materials and Manufacturing Processes. 39 (2024) 9 - p. 1277-1289 , 2024
Link:
https://doi.org/10.1080/10426914.2024.2311386
RT Journal T1 <Title>A hybrid process technology of SiC die separation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1080_10426914.2024.2311386&Exemplar=1&LAN=DE A1 Chen, Shun-Tong A1 Lo, Ping A1 Hu, Chun-Hung PB Informa UK Limited YR 2024 SN 1042-6914 SN 1532-2475 JF Materials and Manufacturing Processes VO 39 IS 9 SP 1277 OP 1289 LK http://dx.doi.org/https://doi.org/10.1080/10426914.2024.2311386 DO https://doi.org/10.1080/10426914.2024.2311386 SF ELIB - SuUB Bremen
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