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1 Ergebnisse
1
Cathode Unit of Magnetron Sputter for High Target Utilizati..:
Park, Jang Sick
;
Park, Lee Soon
;
Lee, Yun-Su
..
Molecular Crystals and Liquid Crystals. 514 (2009) 1 - p. 201/[531]-208/[538] , 2009
Link:
https://doi.org/10.1080/15421400903240787
RT Journal T1 <Title>Cathode Unit of Magnetron Sputter for High Target Utilization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1080_15421400903240787&Exemplar=1&LAN=DE A1 Park, Jang Sick A1 Park, Lee Soon A1 Lee, Yun-Su A1 Lee, Won Geon A1 Jung, Min Ki PB Informa UK Limited YR 2009 SN 1542-1406 SN 1563-5287 JF Molecular Crystals and Liquid Crystals VO 514 IS 1 SP 201/[531] OP 208/[538] LK http://dx.doi.org/https://doi.org/10.1080/15421400903240787 DO https://doi.org/10.1080/15421400903240787 SF ELIB - SuUB Bremen
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