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1 Ergebnisse
1
Defect and strain in hydrogen and helium coimplanted single..:
Duo, Xinzhong
;
Liu, Weili
;
Xing, Su
...
Journal of Physics D: Applied Physics. 34 (2000) 1 - p. 5-11 , 2000
Link:
https://doi.org/10.1088/0022-3727/34/1/302
RT Journal T1 <Title>Defect and strain in hydrogen and helium coimplanted single-crystal silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_34_1_302&Exemplar=1&LAN=DE A1 Duo, Xinzhong A1 Liu, Weili A1 Xing, Su A1 Zhang, Miao A1 Fu, Xiaorong A1 Lin, Chenglu A1 Hu, Pegang A1 Wang, S X A1 Wang, L M PB IOP Publishing YR 2000 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 34 IS 1 SP 5 OP 11 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/34/1/302 DO https://doi.org/10.1088/0022-3727/34/1/302 SF ELIB - SuUB Bremen
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