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Oxidation of Si surface by a pulsed Nd : YAG laser:
Aygun, G
;
Atanassova, E
;
Alacakir, A
..
Journal of Physics D: Applied Physics. 37 (2004) 11 - p. 1569-1575 , 2004
Link:
https://doi.org/10.1088/0022-3727/37/11/011
RT Journal T1 <Title>Oxidation of Si surface by a pulsed Nd : YAG laser</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_37_11_011&Exemplar=1&LAN=DE A1 Aygun, G A1 Atanassova, E A1 Alacakir, A A1 Ozyuzer, L A1 Turan, R PB IOP Publishing YR 2004 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 37 IS 11 SP 1569 OP 1575 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/37/11/011 DO https://doi.org/10.1088/0022-3727/37/11/011 SF ELIB - SuUB Bremen
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