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1 Ergebnisse
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Silicon for primary metrology: the effect of hydrogen on it..:
Becker, P
;
Bettin, H
;
Kuetgens, U
..
Journal of Physics D: Applied Physics. 38 (2005) 22 - p. 4109-4114 , 2005
Link:
https://doi.org/10.1088/0022-3727/38/22/015
RT Journal T1 <Title>Silicon for primary metrology: the effect of hydrogen on its perfection</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_38_22_015&Exemplar=1&LAN=DE A1 Becker, P A1 Bettin, H A1 Kuetgens, U A1 Hallmann-Seiffert, B A1 Riemann, H PB IOP Publishing YR 2005 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 38 IS 22 SP 4109 OP 4114 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/38/22/015 DO https://doi.org/10.1088/0022-3727/38/22/015 SF ELIB - SuUB Bremen
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