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Rf discharge dissociative mode in NF3and SiH4:
Lisovskiy, V
;
Booth, J-P
;
Landry, K
...
Journal of Physics D: Applied Physics. 40 (2007) 21 - p. 6631-6640 , 2007
Link:
https://doi.org/10.1088/0022-3727/40/21/023
RT Journal T1 <Title>Rf discharge dissociative mode in NF3and SiH4</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_40_21_023&Exemplar=1&LAN=DE A1 Lisovskiy, V A1 Booth, J-P A1 Landry, K A1 Douai, D A1 Cassagne, V A1 Yegorenkov, V PB IOP Publishing YR 2007 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 40 IS 21 SP 6631 OP 6640 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/40/21/023 DO https://doi.org/10.1088/0022-3727/40/21/023 SF ELIB - SuUB Bremen
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