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1 Ergebnisse
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Time- and space-resolved high-throughput characterization o..:
Grochla, D
;
Siegel, A
;
Hamann, S
...
Journal of Physics D: Applied Physics. 46 (2013) 8 - p. 084011 , 2013
Link:
https://doi.org/10.1088/0022-3727/46/8/084011
RT Journal T1 <Title>Time- and space-resolved high-throughput characterization of stresses during sputtering and thermal processing of Al–Cr–N thin films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_46_8_084011&Exemplar=1&LAN=DE A1 Grochla, D A1 Siegel, A A1 Hamann, S A1 Buenconsejo, P J S A1 Kieschnick, M A1 Brunken, H A1 König, D A1 Ludwig, A PB IOP Publishing YR 2013 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 46 IS 8 SP 084011 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/46/8/084011 DO https://doi.org/10.1088/0022-3727/46/8/084011 SF ELIB - SuUB Bremen
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