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Achieving high thermal conductivity from AlN films deposite..:
Aissa, K Ait
;
Semmar, N
;
Achour, A
...
Journal of Physics D: Applied Physics. 47 (2014) 35 - p. 355303 , 2014
Link:
https://doi.org/10.1088/0022-3727/47/35/355303
RT Journal T1 <Title>Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_47_35_355303&Exemplar=1&LAN=DE A1 Aissa, K Ait A1 Semmar, N A1 Achour, A A1 Simon, Q A1 Petit, A A1 Camus, J A1 Boulmer-Leborgne, C A1 Djouadi, M A PB IOP Publishing YR 2014 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 47 IS 35 SP 355303 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/47/35/355303 DO https://doi.org/10.1088/0022-3727/47/35/355303 SF ELIB - SuUB Bremen
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