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1 Ergebnisse
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Vacuum ultra-violet emission of CF4and CF3I containing plas..:
el Otell, Z
;
Šamara, V
;
Zotovich, A
...
Journal of Physics D: Applied Physics. 48 (2015) 39 - p. 395202 , 2015
Link:
https://doi.org/10.1088/0022-3727/48/39/395202
RT Journal T1 <Title>Vacuum ultra-violet emission of CF4and CF3I containing plasmas and Their effect on low-k materials</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_48_39_395202&Exemplar=1&LAN=DE A1 el Otell, Z A1 Šamara, V A1 Zotovich, A A1 Hansen, T A1 de Marneffe, J-F A1 Baklanov, M R PB IOP Publishing YR 2015 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 48 IS 39 SP 395202 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/48/39/395202 DO https://doi.org/10.1088/0022-3727/48/39/395202 SF ELIB - SuUB Bremen
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