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1 Ergebnisse
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Tailored voltage waveform capacitively coupled plasmas in e..:
Schüngel, E
;
Korolov, I
;
Bruneau, B
...
Journal of Physics D: Applied Physics. 49 (2016) 26 - p. 265203 , 2016
Link:
https://doi.org/10.1088/0022-3727/49/26/265203
RT Journal T1 <Title>Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0022-3727_49_26_265203&Exemplar=1&LAN=DE A1 Schüngel, E A1 Korolov, I A1 Bruneau, B A1 Derzsi, A A1 Johnson, E A1 O'Connell, D A1 Gans, T A1 Booth, J-P A1 Donkó, Z A1 Schulze, J PB IOP Publishing YR 2016 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 49 IS 26 SP 265203 LK http://dx.doi.org/https://doi.org/10.1088/0022-3727/49/26/265203 DO https://doi.org/10.1088/0022-3727/49/26/265203 SF ELIB - SuUB Bremen
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