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1 Ergebnisse
1
Deposition of Hydrogen-Free Silicon Nitride Thin Films by M..:
Wan-Yu, Ding
;
Jun, Xu
;
Yong, Piao
...
Chinese Physics Letters. 22 (2005) 9 - p. 2332-2334 , 2005
Link:
https://doi.org/10.1088/0256-307x/22/9/053
RT Journal T1
Deposition of Hydrogen-Free Silicon Nitride Thin Films by Microwave ECR plasma Enhanced Magnetron Sputtering at Room Temperature
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0256-307x_22_9_053&Exemplar=1&LAN=DE A1 Wan-Yu, Ding A1 Jun, Xu A1 Yong, Piao A1 Yan-Qin, Li A1 Peng, Gao A1 Xin-Lu, Deng A1 Chuang, Dong PB IOP Publishing YR 2005 SN 0256-307X SN 1741-3540 JF Chinese Physics Letters VO 22 IS 9 SP 2332 OP 2334 LK http://dx.doi.org/https://doi.org/10.1088/0256-307x/22/9/053 DO https://doi.org/10.1088/0256-307x/22/9/053 SF ELIB - SuUB Bremen
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