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1 Ergebnisse
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Doped Polycrystalline 3C-SiC Films Deposited by LPCVD for R..:
Yong-Mei, Zhao
;
Guo-Sheng, Sun
;
Jin, Ning
...
Chinese Physics Letters. 25 (2008) 6 - p. 2269-2272 , 2008
Link:
https://doi.org/10.1088/0256-307x/25/6/095
RT Journal T1
Doped Polycrystalline 3C-SiC Films Deposited by LPCVD for Radio-Frequency MEMS Applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0256-307x_25_6_095&Exemplar=1&LAN=DE A1 Yong-Mei, Zhao A1 Guo-Sheng, Sun A1 Jin, Ning A1 Xing-Fang, Liu A1 Wan-Shun, Zhao A1 Lei, Wang A1 Jin-Min, Li PB IOP Publishing YR 2008 SN 0256-307X SN 1741-3540 JF Chinese Physics Letters VO 25 IS 6 SP 2269 OP 2272 LK http://dx.doi.org/https://doi.org/10.1088/0256-307x/25/6/095 DO https://doi.org/10.1088/0256-307x/25/6/095 SF ELIB - SuUB Bremen
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