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1 Ergebnisse
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Characterization of PECVD grown porous SiO2thin films with ..:
Yang, Pei-zhi
;
Liu, Li-ming
;
Mo, Jing-hui
.
Semiconductor Science and Technology. 25 (2010) 4 - p. 045017 , 2010
Link:
https://doi.org/10.1088/0268-1242/25/4/045017
RT Journal T1
Characterization of PECVD grown porous SiO2thin films with potential application in an uncooled infrared detector
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0268-1242_25_4_045017&Exemplar=1&LAN=DE A1 Yang, Pei-zhi A1 Liu, Li-ming A1 Mo, Jing-hui A1 Yang, Wen PB IOP Publishing YR 2010 SN 0268-1242 SN 1361-6641 JF Semiconductor Science and Technology VO 25 IS 4 SP 045017 LK http://dx.doi.org/https://doi.org/10.1088/0268-1242/25/4/045017 DO https://doi.org/10.1088/0268-1242/25/4/045017 SF ELIB - SuUB Bremen
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