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1 Ergebnisse
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Perhydropolysilazane spin-on dielectrics for inter-layer-di..:
Kim, Sam-Dong
;
Ko, Pil-Seok
;
Park, Kyoung-Seok
Semiconductor Science and Technology. 28 (2013) 3 - p. 035008 , 2013
Link:
https://doi.org/10.1088/0268-1242/28/3/035008
RT Journal T1
Perhydropolysilazane spin-on dielectrics for inter-layer-dielectric applications of sub-30 nm silicon technology
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0268-1242_28_3_035008&Exemplar=1&LAN=DE A1 Kim, Sam-Dong A1 Ko, Pil-Seok A1 Park, Kyoung-Seok PB IOP Publishing YR 2013 SN 0268-1242 SN 1361-6641 JF Semiconductor Science and Technology VO 28 IS 3 SP 035008 LK http://dx.doi.org/https://doi.org/10.1088/0268-1242/28/3/035008 DO https://doi.org/10.1088/0268-1242/28/3/035008 SF ELIB - SuUB Bremen
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