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A low-pressure encapsulated deep reactive ion etched resona..:

Melin, Jessica ; Enoksson, Peter ; Corman, Thierry.
Journal of Micromechanics and Microengineering.  10 (2000)  2 - p. 209-217 , 2000
Link: https://doi.org/10.1088/0960-1317/10/2/319