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1 Ergebnisse
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Stress investigation of PECVD dielectric layers for advance..:
Tarraf, A
;
Daleiden, J
;
Irmer, S
..
Journal of Micromechanics and Microengineering. 14 (2003) 3 - p. 317-323 , 2003
Link:
https://doi.org/10.1088/0960-1317/14/3/001
RT Journal T1 <Title>Stress investigation of PECVD dielectric layers for advanced optical MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_14_3_001&Exemplar=1&LAN=DE A1 Tarraf, A A1 Daleiden, J A1 Irmer, S A1 Prasai, D A1 Hillmer, H PB IOP Publishing YR 2003 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 14 IS 3 SP 317 OP 323 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/14/3/001 DO https://doi.org/10.1088/0960-1317/14/3/001 SF ELIB - SuUB Bremen
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