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1 Ergebnisse
1
Generic technological platform for microfabricating silicon..:
Guenat, O T
;
Generelli, S
;
Dadras, M
...
Journal of Micromechanics and Microengineering. 15 (2005) 12 - p. 2372-2378 , 2005
Link:
https://doi.org/10.1088/0960-1317/15/12/020
RT Journal T1 <Title>Generic technological platform for microfabricating silicon nitride micro- and nanopipette arrays</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_15_12_020&Exemplar=1&LAN=DE A1 Guenat, O T A1 Generelli, S A1 Dadras, M A1 Berdondini, L A1 Rooij, N F de A1 Koudelka-Hep, M PB IOP Publishing YR 2005 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 15 IS 12 SP 2372 OP 2378 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/15/12/020 DO https://doi.org/10.1088/0960-1317/15/12/020 SF ELIB - SuUB Bremen
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