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1 Ergebnisse
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An approach to fabricating microstructures that incorporate..:
Dai, Ching-Liang
;
Xiao, Fu-Yuan
;
Juang, Ying-Zong
.
Journal of Micromechanics and Microengineering. 15 (2004) 1 - p. 98-103 , 2004
Link:
https://doi.org/10.1088/0960-1317/15/1/015
RT Journal T1 <Title>An approach to fabricating microstructures that incorporate circuits using a post-CMOS process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_15_1_015&Exemplar=1&LAN=DE A1 Dai, Ching-Liang A1 Xiao, Fu-Yuan A1 Juang, Ying-Zong A1 Chiu, Chin-Fon PB IOP Publishing YR 2004 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 15 IS 1 SP 98 OP 103 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/15/1/015 DO https://doi.org/10.1088/0960-1317/15/1/015 SF ELIB - SuUB Bremen
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